R&D Capabilities

Process Capabilities

The SnFPC is part of the extensive research facility in Nanofabrication and Characterization techniques housed across different Science and Engineering Research Council's participating Institutes that is made accessible to all researchers from A*STAR, Institute of Higher Learning (IHL) and industry partners.

The SnFPC focuses on the following main areas:

  1. Solid-state Memory (STT-MRAM, PC-RAM, R-RAM) - A full range of silicon wafer processing tools are available to support 100 mm, 200 mm, 300 mm wafer size.
  2. Advanced Concepts and Nanotechnology - Newly installed silicon wafer processing and characterization tools in new cleanroom facility are capable of supporting 200 mm wafer sizes. Comprised mainly of R&D class deposition, etching and characterization tools.  

Below is a non-exhaustive list of equipment available:

 1 Photolithography and Patterning

  •  Canon FPA 3000 EX5 DUV Scanner (8-inch capable) 
  •  Elionix E-Beam Lithography 
  •  Gamma 60 Spin Coaper
  •  HMDS Coater 
  •   Mask Aligner 
  •  SVG Track System (8-inch capable) 

2  Dry Etching Equipment
  •  Advance Dielectric Etcher (SPTS LPX ICP SR) 
  •  Chemically-Assisted Ion Beam Etcher (Oxford Instrument Ionfab300 Plus-LC) 
  •  ICP-Cl Etcher (Oxford Instrument PlasmaPro 100 Cobra) 
  •  ICP-F Etcher (Oxford Instrument PlasmaPro 100 Cobra) 
  •  LAM Exelan
  •  Axcelis Stripper

3 Thin Film Deposition equipment
  •  Atomic Layer Deposition (Picosun SUNALE ALD System) 
  •  E-Beam Evaporator (Angstrom Engineering Evovac) 
  •  Ion Assisted Deposition (Oxford Instrument Optofab 300) 
  •  ICP-CVD (Oxford Instrument Plasma System 100) 
  •  iPVD (Singulus Timaris) 
  •  AMAT Endura
  •  AMAT Producer

4 Annealing and Oxidation
  •  Horizontal Thermal Furnace Stack (First Nano EasyTube 6000) 
  •  Rapid Thermal Annealing (Jipelec JetFirst200C) 

5 Process Characterization
  •   Atomic Force Microscope 
  •   Tencor Surface Profiler (Tencor P-16)

Who to Contact:
Mr Leonard Gonzaga
E: leonard_verano_gonzaga@imre.a-star.edu.sg