RUGGED MEMS SENSORS


Product Oriented Devices Applications 
            
Pressure Sensor                    AlN Resonator
 
  • Pressure
  • Fluid Density
  • Fluid Viscosity
 
Accelerometer
 
  • Vibration/ Shock
  • Microgravity Sensing
 
IR Sensor
 
  • Hydrocarbon Detection
 
Acoustic Transducer
 
  • Acoustic Telemetry Transducer
 
Optical Sensors
 
  • Opto-mechanical Sensor
 
NEMS Based Rugged Memory
 
  • NEMS Based Rugged Memory





Sensor MCM for Downhole Tool