Workshop on Sputtering Technology for Thin Film Processes

Date: 22 Sep 2008 - 22 Sep 2008

Venue: Auditorium, Level 3, SIMTech Tower Block, 71 Nanyang Drive

A fundamental understanding of vacuum systems and plasma behaviour, and their effects on process and film quality can greatly improve the ability to diagnose, manipulate, and optimise thin film processes. This one-day workshop provides participants opportunity to learn theory and practices that are most essential for the success of thin film processes. It provides practical instructions that can be immediately applied to improve the performance of plasma-based systems. The workshop also covers fundamental concepts that are essential for making decisions on manufacturing operations over the long term and discuss challenging process issues.

Mr Ken Nauman, Advanced Energy (AE), US
Mr Doug Pelleymounter, Advanced Energy (AE), US
Dr Zeng Xianting, Singapore Institute of Manufacturing Technology (SIMTech)
Dr Ding Xing Zhao, Singapore Institute of Manufacturing Technology (SIMTech)

9.00 am Registration & Networking (Welcome Refreshments will be served)
9.40 am  Welcome Message
9.50 am Vacuum Basics
10.50 am Plasma Basics
12.00 pm Lunch
1.00 pm Thin-Film Quality: Choosing & Setting Up Power Supplies
1.40 pm Thin-Film Quality: Practical Instructions for Proper Grounding
2.30 pm Thin-Film Quality: Other Film Issues
3.20 pm Tea Break
3.40 pm Introduction of SIMTech’s Thin Film R&D Activities
4.00 pm  Reactive Sputtering Process and Control
4.20 pm  Hybrid PVD/CVD Process for Depositing Amorphous Carbon Composite Coatings
4.40 pm  Lab Tour
5.00 pm End

For presentation slides, please click on above links

Who Should Attend
This workshop is beneficial to senior management, industry professionals, managers, engineers, academic staff, researchers and students who are interested in thin film processes for the precision engineering, aerospace, automotive, electronics and energy clusters. Those who are involved in research and development or education on vacuum and plasma for thin film processes will also benefit from this seminar.
This workshop is free of charge to all participants from industry or research communities. Pre-registration is required. Seats are to be confirmed on a first-come, first-served basis. Refreshments and lunch are provided.  Please register online by 17 Sep, Wednesday

Technical Enquiries: Mr Huang Zhaohong,

Registration Enquiries: Ms Fong Cheng Yen,