Technology Lecture: Mechatronics for Micro-Nanopositioning

Date: 27 Sep 2007 - 27 Sep 2007

Venue: Seminar Room , Level 1, SIMTech Valley Block

Nanoscience – the ‘science of the small’ – is made possible, in large part, by our ability to position and measure with nanometer scale resolution. This talk will focus on positioning systems and explore how parallel-kinematics schemes can help with the design of high-bandwidth, high-precision positioning systems and examples on how the underlying kinematic and dynamic behaviour systems can be exploited for the purpose of control. The fabrication and testing of MEMS(Micro-Electro-Mechanical Systems)-scale parallel-kinematics schemes and the potential for such systems in high-throughput metrology and manufacturing will also be covered. Finally, this lecture will touch on the issue of calibration for both single-axis and multi-axis nanopositioning systems and the approaches to self-calibration of such systems.

Dr Placid M. Ferreira is the Grayce Wicall Gauthier Professor of Mechanical and Industrial Engineering at Illinois. He is also the director of the Center for Chemical-Electrical-Mechanical Manufacturing Systems (Nano-CEMMS), an NSF-sponsored Nanoscale Science and Engineering Center. He graduated with a Ph.D in Industrial Engineering from Purdue University in 1987, M.Tech (Mechanical) from IIT Bombay, 1982 and B.E. (Mechanical) from University of Bombay in 1980. He has been on the mechanical and industrial faculty at Illinois since 1987, serving as the associate head for graduate programs and research from 1999 to 2002.

Professor Ferreira's research and teaching interests are in the area of industrial automation and include computer-controlled machine-tools, nano-manufacturing and metrology, computational geometry and solid modeling with applications to automated process planning, and the discrete-event control of large-scale flexibly automated systems.

Professor Ferreira received NSF's Presidential Young Investigator Award in 1990, SME's Outstanding Young Investigator Award in 1991 and the University of Illinois' University Scholar Award in 1994. He has served as an associate editor for IIE Transactions on Design and Manufacturing and editor for IEEE Transactions on Automation Science and Engineering. He is on the editorial board for the International Journal of Computer Integrated Manufacturing.

Who Should Attend
R&D managers, engineers and researchers in the areas of precision engineering, semiconductor, MEMS, and machine & equipment development.

Pre-registration for the lecture is required. Admission is free. All are welcome.
Seats are available on a first-come-first-served basis.

To register, please send your name, job title and organisation name to