Research Projects

Flexure-based Electromagnetic Linear Actuator (FELA)

The project is to develop a high-performance liner actuator with nano-level resolution (<25nm), large travel range (>2mm), large thrust force (>50N), and high dynamic response for various micro/nano-positioning and force control applications.


 


SolutionInstead of using PZT actuator, a Flexure-based Electromagnetic Linear Actuator (FELA) is developed. It is an electromagnet-driven flexure-supported nano-positioning actuator that possesses the excellent features as listed in the benefits below.
Benefits
  • ±10 nm positioning accuracy
  • 4 mm stroke in a compact-sized design
  • 60 N/Amp force sensitivity in a compact-sized design
  • 100 mm/sec actuating speed
  • A PCT patent filed
Patents / Awards / Achievements / Differentiation
  • ±10 nm positioning accuracy
  • 4 mm stroke in a compact-sized design
  • 60 N/Amp force sensitivity in a compact-sized design
  • 100 mm/sec actuating speed
  • A PCT patent filed
Applications
  • Layer-over-layer soft-nanoimprint process.
  • Direct force control for micro hot-embossing or die-attaching tool heads
  • Various nano-positioning systems
  • Active vibration control

Problems Addressed

An actuator with nano-positioning capability has long been the key technology in various micro-manufacturing applications. Among various types of nano-positioning actuators, the solid-state Piezoelectric (PZT) actuators have been the most popular choice due to their large actuating force and high stiffness. Unfortunately, PZT actuators have limited strokes that make them unsuitable for high-precision systems with larger workspaces.