Laser Interferometer

• Model: GPI-XP
  • Aperture size: 100 and 300 mm
  • Laser source: 0.6328 mm HeNe laser
  • Accuracy: < 6.3nm (peak to valley)
• Model: Zygo Verifire HD
  • Measuring range: 150 mm in diameter
  • RMS repeatability: <= 0.035 nm
  • Uncertainty of flatness measurement in P-V: <= 6.3 nm

• It is a non-contact areal surface profiler where an interference objective (Michelson/Mirau) is used to magnify the sample surface to be captured by a CCD camera. The resulting interference pattern based phase shifting and vertical scanning interferometry is used to measure surface topography.
• Model: Bruker ContourGT-X
  • Vertocal Measuring range: up to 10 mm
  • Measuring resolution: 0.1 nm
  • Manification: up to 100X
  • Sample Height: up to 100 mm

• A vertical laser interferometer for high-precision flatness and radius of curvature measurement of plane and spherical surface at nanometer accuracy level.
• Model: Zygo Verifire XP/D
  • Measurement area: 102 mm (4 inch)
  • Measurable surface reflectivity: 0.1% ~ 100%
  • Measurement uncertainty: 32 nm
  • Radius of curvature measurement:
    • Measuring resolution of 1 µm
    • Measuring range of 150 mm
    • Measuring accuracy of 10 µm

V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662

National Metrology Centre
1 Science Park Dr, Singapore 118221