Stylus Profilometer

• There are multiple stylus profilometers available:
• Model: Form Talysurf 200
• Vertical resolution: 0.2 nm
• Data sampling in X-axis: 0.125 µm
• Max. scan size: 200 mm (x) x 100 mm (y) x 25 mm (z)
• Model: KLA Tencor P16
• Wafer Size: From small samples up to 200mm wafers
• Scan range: up to 200 mm
• Vertical range: up to 110 um
• Step height repeatability of 6Å or 0.1% (1σ)
• Model: Talylor Hobson PGI2540
• Measuring range:
• Z axis – 12.5 mm ( 60 mm stylus arm), 25.0 mm (120 mm stylus arm)
• X axis – 200 mm
• Measuring resolution:
• Z axis – 0.2 nm at 12.5 mm range, 0.4 nm at 25.0 mm range
• X axis – 125 nm over 200 mm
• System noise: 1 nm RMS
• Form measuring uncertainty: 200 nm
• Stylus radius: 2 µm, 5 µm, 0.25 mm and 0.5 mm
• Model: Panasonic UA3P
• Direct traceability to SI metre
• Measuring range: 30 mm x 30 mm x 20 mm
• Measuring resolution: 3 nm
• Maximum measuring angle: 75 °
• Measuring uncertainty:
• Less than 30°: 50 nm
• 30°to 45° : 80 nm
• Above 45° : 150 nm
• Stylus Radius: 2 μm (Diamond), 0.5 mm (Ruby)
• Probing force : 150 to 300 μN
• Model: NanoMap-500LS 3D Contact Surface Profilometer
• Piezo Tip scan
• Z range: nm to 1m
• XY scanning range: up to 150X150mm
• Generates both 3D image and 2D images
• Integrated color optical camera for direct sample viewing during scanning

V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662

National Metrology Centre
1 Science Park Dr, Singapore 118221

Institute of Materials Research and Engineering
Synthesis, 6 Fusionopolis Link

Institute of Microelectronics
11, Science Park Road, Singapore Science Park II, Singapore 117685