IME's SAM Programme focuses on R&D activities in the area of Si-based MEMS devices for various applications, such as automotive, medical, biometrics, telecommunication, consumer electronics, display, etc. IME has the full integrated research capabilities for SAM to carry a project, from the concept to fabricating a prototype or final product. These capabilities include: (1) MEMS design & simulation, (2) Application Specific Integrated Circuit (ASIC) for MEMS signal conditioning, (3) MEMS fabrication processes and (4) advanced packaging technologies for MEMS devices. 

IME has been working with many commercial companies in developing many cost-effective MEMS products and devices, such as integrated pressure sensor, accelerometer, micro-relay, silicon microphones, micro-mirrors, etc. Many of these devices have been commercialized successfully. IME's SAM programme serves as an important mechanism in providing our industrial partners a responsive and affordable access to the latest MEMS technology.

Research Areas

  • Optical MEMS
    • For display
    • For Si Photonics integration
  • Inertial MEMS devices
    • For medical application
    • For consumer electronics
    • For energy harvesting
    • For telecommunication


For enquiries, please contact:

Mr. Tan Wee Ming

Tel: +65 6770 5770