Publicatoins

Title of PublicationAuthor(s)Name of Journal / Conference
Wafer-Level Vacuum-Packaged Piezoelectric Energy Harvesters Utilizing Two-Step Three-Wafer BondingWang Nan, Siow Li Yan, Lionel Wong You Liang, Sun Chengliang, Ji Hongmiao, I Made Darmayuda, Peter Chang, Zhang Qingxin, Alex Gu YuandongElectronic Components and Technology Conference (ECTC 2017) Florida USA 30 May - 02 June 2017 DOI 10.1109/ECTC.2017.108
High Vacuum and High Robustness Al-Ge Bonding for Wafer Level Chip Scale Packaging of MEMS SensorsXu Jinghui, Ding Zhipeng, Vivek Chidambaram, Ji Hongmiao, Alex Gu YuandongElectronic Components and Technology Conference (ECTC 2017) Florida USA 30 May - 02 June 2017 DOI 10.1109/ECTC.2017.228
High-Band AIN Based RF-MEMS Resonator for TSV IntegrationWang Nan, Zhu Yao, Sun Chengliang, Yu Mingbin, Chua Gengli, Merugu Srinivas, Navab Singh, Alex Gu YuandongElectronic Components and Technology Conference (ECTC 2017) Florida USA 30 May - 02 June 2017 DOI 10.1109/ECTC.2017.220
Hybrid Photonic Cavity with Metal-Organic Framework Coatings for the Ultra-Sensitive Detection of Volatile Organic Compounds with High Immunity to HumidityTao Jifang, Wang Xuerui (NUS), Sun Tao, Cai Hong, Wang Yuxiang (NUS), Lin Tong (NUS), Fu Dongliang, Lennon Lee Yao Ting, Alex Gu Yuandong, Prof. Zhao Dan (NUS)Nature Scientific Report, Published: 31 January 2017, 7:41640, DOI: 10.1038/srep41640
A dual-mass fully decoupled MEMS gyroscope with wide bandwidth and high linearityWu Guoqiang, Chua Geng Li, Alex Gu YuandongSensors and Actuators A, 0924-4247/©2017 Elsevier B.V, Published 25 Mar 2017, http://dx.doi.org/10.1016/j.sna.2017.03.027
Torsional Frequency Mixing and Sensing in Optomechanical ResonatorsHuang Jian Guo (XJU/NTU/IME), Cai Hong, Alex Gu Yuandong, Chin Lip Ket (NTU), Wu Jiu Hui (Xi'an), Chen Tian Ning (XJU), Yang Zheng Chuan (PU), Hao Yi Long (PU), Liu A Qun (NTU)Applied Physics Letters (APL) 111, 111102 (2017), Published 12 Sep 2017, DOI#http://dx.doi.org/10.1063/1.4986811
Dual MEMS Resonator Structure for Temperature Sensor ApplicationsHumberto Campanella, Margarita Narducci, Srinivas Merugu, Navab SinghIEEE Transactions on Electron Devices, Year: 2017, Volume: 64, Issue: 8, Pages: 3368 - 3376, DOI: 10.1109/TED.2017.2708129, IEEE Journals & Magazines
ScAlN based LCAT Mode Resonators above 2GHz with High FOM and Reduced Fabrication ComplexityZhu Yao, Wang Nan, Chua Gengli, Sun Chengliang, Navab Singh and Alex Gu YuandongIEEE Electron Device Letters, Vol 38, No. 10, Published Oct 2017, DOI#10.1109/LED.2017.2747089
Hermetic Wafer Level Thin Film Packaging for MEMSJeffrey Bo Woon Soon, Navab Singh, Enes Calayir (CMU), Gary K. Fedder (CMU), Gianluca Piazza (CMU)66th Electronic Component and Technology Conference (ECTC 2016), Las Vegas, NV, 31 May - 3 June 2016 (DOI 10.1109/ECTC.2016.317)
A Passively Temperature-Compensated Dual-Frequency ALN-ON-SILICON Resonator for Accurate Pressure SensingXie Qingyun, Wang Nan, Sun Chengliang, Andrew B. Randles, Pushpapraj Singh, Zhang Xiaolin and Alex Gu Yuandong30th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017) 22-26 Jan 2017 Las Vegas USA Paper#T-161
High Q Low Impedance WLCSP Resonator for SUB-100 MHz Programmable Oscillator ApplicationWu Guoqiang, Xu Jinghui, Zhang Xiaolin, Wang Nan, Yan Danlei, Jayce Lim Lay Keng, Zhu Yao, Li Wei and Alex Gu Yuandong
30th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017) 22-26 Jan 2017 Las Vegas USA Paper#W-144
ALN Wideband Engery Harvesters with Wafer-level Vacuum Packaging Utilizing Three-Wafer BondingWang Nan, Siow Li Yan, Ji Hongmiao, Peter Chang, Zhang Qingxin, Sun Chengliang, Alex Gu Yuandong
Sun Chengliang
30th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017) 22-26 Jan 2017 Las Vegas USA Paper#W-126
A Novel Low-Light-Level Optical Switch By Using Nano-Opto-Mechanics TechnologyTao Jifang, Cai Hong, Lennon Lee Yao Ting, Alex Gu Yuandong30th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2017) 22-26 Jan 2017 Las Vegas USA Paper#W-150
GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethersGuoqiang Wu,Srinivas Merugu, Nan Wang, Yao Zhu, Chengliang Sun, and Yuandong GuApplied Physics Letters, 109, 013506, Published 8 July 2016, doi: 10.1063/1.4955410
Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platformWang Nan, Xu Jinghui, Zhang Xiaolin, Wu Guoqiang, Zhu Yao, Li Wei, Alex Gu YuandongJournal of Micromechanics and Microengineering (JMM) 26 (2016) 074003 (10pp), Published 20 May 2016, doi:10.1088/0960-1317/26/7/074003
An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics PlatformJifang Tao, Luo Yu (NTU), Li Wang (NMC), Cai Hong, Sun Tao, Junfeng Song, Liu Hui (NMC) and Alex Gu YuandongNature Scientific Report,6:29672, Published 15 July 2016, DOI: 10.1038/srep29672
AlN-on-SOI platform-based Micro-Machined hydrophoneJinghui Xu, Xiaolin Zhang, Sanchitha N. Fernando, Kevin TshunchuanChai and Alex Gu YuandongApplied Physics Letters,109, 032902 (2016), Published 19 July 2016, doi: 10.1063/1.4959078
A High Coupling Coefficient 2.3GHz AlN Resonator for High Band LTE Filtering ApplicationZhu Yao, Wang Nan, Sun Chengliang, Srinivas Merugu, Navab Singh, and Alex Gu YuandongIEEE Electron Device Letters (EDL), VOL. 37, NO. 10, OCTOBER 2016, DOI#10.1109/LED.2016.2602852
Effectiveness of Oxide Trench Array as a Passive Temperature Compensation Structure in AlN-on-Silicon Micromechanical ResonatorsXie Qingyun, Wang Nan, Sun Chengliang, Andrew Randles, Pushpapraj Singh, Zhang Xiaolin Zhang, and Alex Gu YuandongApplied Physics Letters, 110, 083501 (Published 21-Feb-2017); doi: 10.1063/1.4976808
ALN-ON-SOI Platorm-Based MEMS Hydrophone with ultra-low operation frequency and ultra high noise resolutionXu Jinghui, Zhang Xiaolin, Sanchitha Feranando, Srinivas Merugu, Alex Gu Yuandong, Anders Mattson (PGS), Rune Tenghamn (PGS), Fred Barr (PGS)IEEE MEMS 2016, Shanghai, 24-26 Jan 2016 (#0259) (M-211)
A Novel Miniaturized Photonic Dew-Point Hygrometer with Ultra-High AccuracyTao Jifang, Cai Hong, Sun Tao, Alex Gu YuandongIEEE MEMS 2016, Shanghai, 24-26 Jan 2016 (#0163) W-162
Cavity attributing to fast release in Thin Film Encapsulation of MEMS device fabricated on smart SOI waferJae-Wung Lee, Jaibir Sharma, Margarita Sofia Narducci, Srinivas Merugu, Zhang Xiao Lin and Navab SinghJournal of Micromechanics and Microengineering (JMM), Published 15 May 2015 doi:10.1088/0960-1317/25/6/065010
A Robust Bilayer Cap in Thin Film EncapsulationJaibir Sharma, Jae-Wung Lee, Srinivas Merugu and Navab SinghIEEE Transactions on Components, Packaging and Manufacturing Technology (IEEE CPMT), VOL. 5, NO. 7, JULY 2015, DOI#10.1109/TCPMT.2015.2402296
Demonstration of a Photonic-based Linear Temperature SensorTao Jifang, Cai Hong, Alex Gu Yuandong, Wu Jian (BUPT), Liu Aiqun (NTU)IEEE Photonics Technology Letters (PTL),VOL. 27, NO. 7, APRIL 1, 2015, DOI#10.1109/LPT.2015.2392107
Methods for improving Electromechanical Coupling Coefficient in Two Dimensional Electric Field Excited AIN Lamb Wave ResonatorsSun Chengliang, Soon Bo Woon, Zhu Yao, Wang Nan, Samuel Loke Pei Hao, Mu Xiaojing, Tao Jifang and Alex Gu YuandongApplied Physics Letters (APL) 106, 253502 (2015), Published June 2015, DOI#10.1063/1.4923207
Diaphragm shape effect on the sensitivity of surface acoustic wave (SAW) based pressure sensor for harsh environmentWang Tao (IME/NUS), Mu Xiaojing, Andrew Brenson Randles, Alex Gu Yuandong and Lee Chengkuo (NUS)Applied Physics Letters (APL) 107, 123501 (2015); Published Sep 2015, doi: 10.1063/1.4931363
RF-Designed High-Power Lamb-Wave
Aluminum–Nitride Resonators
Humberto Campanella, Margarita Narducci, Nan Wang, Jeffrey Bo Woon SoonIEEE Transactions on Microwave Theory and Techniques (MTT),VOL. 63, NO. 2, Published -FEBRUARY 2015, DOI; 10.1109/TMTT.2014.2381244