A Process-Induced-Frequency-Drift Resilient 32 KHz MEMS Resonator

Silicon-based microelectromechanical systems (MEMS) resonator is a potential cost-effective alternative to quartz-based counterparts for timing and frequency applications, but is prone to resonant frequency variation. This paper describes an innovative method to design a capacitive MEMS sensor that is insensitive to process-induced variation for improved frequency robustness. The method is expected to significantly improve the reliability and fabrication yield of MEMS resonator, and can also be extended to other vibrating MEMS devices.
1.    Jinghui Xu et. al., “A Process-induced-Frequency-Drift Resilient 32 KHz MEMS Resonator”, Journal of Micromechanics and Microengineering, Vol. 22, Iss. 10, 105029, 2012