Aluminium Nitride Lamb-Wave Resonators for High Power, High Frequency Applications

Stresses generated during high power applications in market-dominant bulk acoustic wave (BAW) resonators limit their performance in advanced wireless communication systems. This paper describes the design and development of a Lamb-wave resonator. The novel checker-patterned electrode design improves the power-handling capability of the resonator, which can be further scaled up to the desired frequency and output power, paving way for next generation high-power radiofrequency (RF) applications.
1.    Humberto Campanella et. al., “Aluminium nitride lamb-wave resonators for high power, high frequency applications”, IEEE Electron Device Letters, Vol. 54, No. 2, Pg 316 - 318, 2013