Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Tilt Sensors

Tilt angle sensors are paramount in the operation and navigation of vehicles and machinery. This paper describes for the first time a capacitive micromachined ultrasonic transducer (CMUT) device for tilt angle sensing. The device makes use of the same pulse-echo ultrasound signals used in medical imaging to derive tilt angle information. The proposed tilt angle sensing mechanism is experimentally validated, paving way to integrate precise location feature in CMUT-based medical imaging technology for improved treatment outcome.
1.    Hongbin Yu et. al., “Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Tilt Sensors”, Applied Physics Letters, Vol. 101, Iss. 15, 153502, 2012