Integrated Circuits and AI Hardware
Sensors, Actuators and Embedded Memory
R & D Fab
Material, Device, Reliability Analysis
Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Tilt Sensors
Tilt angle sensors are paramount in the operation and navigation of vehicles and machinery. This paper describes for the first time a capacitive micromachined ultrasonic transducer (CMUT) device for tilt angle sensing. The device makes use of the same pulse-echo ultrasound signals used in medical imaging to derive tilt angle information. The proposed tilt angle sensing mechanism is experimentally validated, paving way to integrate precise location feature in CMUT-based medical imaging technology for improved treatment outcome.
Hongbin Yu et. al., “Capacitive Micromachined Ultrasonic Transducer (CMUT) Based Tilt Sensors”, Applied Physics Letters, Vol. 101, Iss. 15, 153502, 2012
Copyright A*STAR Institute of Microelectronics 2019