Metallic Hermetic Sealing for MEMS Packaging in Harsh Environments

Hermetic sealing is an important technology for high-temperature devices and systems for deep-hole drilling and aerospace applications. IME researchers have developed a CMOS-compatible Al-Ge hermetic sealing technology for high-temperature microelectromechanical system (MEMS) sensors.
Vivek Chidambaram et. al., “Development of Metallic Hermetic Sealing for MEMS Packaging for Harsh Environments Application," Journal of Electronic Materials, Vol. 41, Iss. 8, Pg. 2256 - 2266, 2012