Metallic Hermetic Sealing for MEMS Packaging in Harsh Environments

Hermetic sealing is an important technology for high-temperature devices and systems for deep-hole drilling and aerospace applications. IME researchers have developed a CMOS-compatible Al-Ge hermetic sealing technology for high-temperature microelectromechanical system (MEMS) sensors.
 
Reference:
Vivek Chidambaram et. al., “Development of Metallic Hermetic Sealing for MEMS Packaging for Harsh Environments Application," Journal of Electronic Materials, Vol. 41, Iss. 8, Pg. 2256 - 2266, 2012