Integrated Circuits and AI Hardware
Sensors, Actuators and Embedded Memory
R & D Fab
Material, Device, Reliability Analysis
Silicon Photonics: Brought Into Line
IME researchers have developed a MEMS platform with integrated functions of ultra fine optical alignment and positional locking. IME’s on-chip alignment platform provides optimum light coupling from laser diode to a small core Si waveguide with performance of <1dB/facet and <+/-1um alignment precision, respectively. The proposed work is expected to replace costly conventional alignment equipment, with potential utilization in hybrid integrated Si photonics, as well as applications that consist of LD-ball lens-Si-waveguide coupling system.
Copyright A*STAR Institute of Microelectronics 2019