The Shuttle NEM Non-Volatile Memory

IME researchers have developed an original non-volatile nanoelectromechanical (NEM) device for high temperature data storage. The memory cell consists of a floating metal electrode (i.e. the shuttle) guided inside a pod cavity, which is actuated by electrostatic forces. Instead of mechanical anchors, the device employs adhesion forces to hold the electrodes in stable positions. The fundamental operational performance of the anchorless design is validated by two different modelling approaches which also predict low actuation voltage and good reliability that are competitive with market-dominant FLASH memory. The use of adhesion forces in the anchorless design further enhances high temperature data retention that is essential for non-volatile memory operation in high temperature rugged environments required by military, as well as oil and geothermal industries.


Pott Vincent et. al., “The Shuttle Nano-Electro-Mechanical Non-Volatile Memory," IEEE Transactions on Electron Devices, Vol. 59, Pg. 1137 – 1143, 2012