U-Shape NEM Switch for Ultra-Low Power Logic Applications

IME researchers have designed and developed a U-shaped nanoelectromechanical (NEM) switch for ultra-low-power logic applications. The switch is fabricated by CMOS-compatible process on silicon-on-insulator (SOI) wafer, while its mechanical design consists of a capacitive paddle supported by two flexible silicon nanowires. The switch shows remarkable low pull-in voltage (1.1V), high ON/OFF current ratio (over 5 decades with steep-slope switching characteristics), negligible OFF current and repeatable switching behaviour in ambient air. Due to its voltage compatibility with advanced CMOS technology nodes, it can eventually be co-integrated on chip with front-end devices to offer zero-standby-power performance.

You Qian et. al., “A Dual Silicon Nanowire Based U-Shape Nanoelectromechanical Switch with Low Pull-In Voltage," Applied Physics Letters, Vol. 100, 113102, 2012