21 JULY 2022
LPE and A*STAR’s Institute of Microelectronics to develop high quality 200mm sic and specialty epitaxy processes
22 Jul 2022
SINGAPORE – LPE and the Institute of Microelectronics (IME) at the Agency for Science, Technology and Research (A*STAR) have announced a research collaboration to develop high quality 200mm silicon carbide (SiC) and specialty epitaxy processes including enhanced growth rates with improved uniformity. This will be done through experimental activities supported by simulation studies.
Under the collaboration, the parties will leverage LPE’s knowledge in SiC chemical vapour deposition (CVD) reactor technology and SiC epitaxial growth, plus IME’s research capabilities and facilities, 200mm SiC pilot process integration line, and cutting-edge material characterisation equipment. The aim is to create 200mm epitaxy processes with enhanced growth rate and uniformities, and reduced killer defect densities.
The 200mm SiC pilot line is being established by A*STAR’s IME to validate 200mm manufacturing processes and tools on a pilot scale before transitioning to 200mm high-volume manufacturing. This collaboration will be part of IME’s plans for establishing a 200mm SiC innovation programme.
SiC epitaxy is one of the essential process steps for 200mm device processing of the upcoming 200mm SiC pilot line. The manufacturing industry is projected to move towards using a unique single-wafer chamber SiC epitaxy tool. LPE, which contributes their tools into the innovation programme, is geared towards quicker industrial adoption.
For this collaboration, both parties will work on the development of high quality 200mm SiC and specialty epitaxy processes, including the following areas:
• Validation of LPE PE1O8 SiC epitaxy reactor for 150mm / 200mm wafers
• Enhancement of 200mm SiC epilayer uniformity
• Development of 200mm SiC epitaxy processes with increased growth rates
• Development of specialty SiC epitaxy processes on 200mm SiC wafers
“All of us at LPE are very excited about the collaboration with A*STAR’s IME which will result in extraordinary market expansion of 200mm SiC based devices. As SiC power modules become pervasive, a more efficient use of electrical power will make a sustainable growth possible,” said Franco Preti, CEO at LPE.
“We look forward to this joint research between A*STAR’s Institute of Microelectronics and LPE to develop high quality 200mm SiC and specialty epitaxy processes,” said Mr Terence Gan, Executive Director, A*STAR’s IME. “The success of this collaboration will benefit the SiC manufacturing ecosystem and accelerate the adoption of high performance SiC power modules across various applications such as electric vehicles and charging points,” he added.
For media queries, please contact:
Mr. Luca Porru
Tel: +39 02 3834151
Mr Robin Chan
Head, Corporate Communications
Agency for Science, Technology and Research (A*STAR)
Tel: +65 6826 6281
LPE was founded in Milan in 1972. Introducing the first induction heated EPI Reactor capable to grow very thick, high quality epitaxial layer, LPE contributed to the European semiconductor industry development in the power discrete devices production.
Almost fifty years later, LPE has grown to be a worldwide recognised leading supplier for Silicon and Silicon Carbide Epitaxial reactor manufacturer.
More than 400 Silicon Reaction Chambers in operation, nearly 100 Silicon Carbide Reactors sold, worldwide Customer base, Sales and Service organisation in 10 countries; R&D cooperation with European University on processes and materials for power electronics.
About the Institute of Microelectronics (IME)
The Institute of Microelectronics (IME) is a research institute of the Agency for Science, Technology and Research (A*STAR). Positioned to bridge the R&D between academia and industry, IME's mission is to add value to Singapore's semiconductor industry by developing strategic competencies, innovative technologies and intellectual property; enabling enterprises to be technologically competitive; and cultivating a technology talent pool to inject new knowledge to the industry. Its key research areas are in Heterogeneous Integration, System-in-Package, Sensor, Actuators and Microsystems, RF & mmWave, SiC & GaN-on-SiC/Si, and MedTech. For more information on IME, please visit www.a-star.edu.sg/ime.
About the Agency for Science, Technology and Research (A*STAR)
The Agency for Science, Technology and Research (A*STAR) is Singapore's lead public sector R&D agency. Through open innovation, we collaborate with our partners in both the public and private sectors to benefit the economy and society. As a Science and Technology Organisation, A*STAR bridges the gap between academia and industry. Our research creates economic growth and jobs for Singapore, and enhances lives by improving societal outcomes in healthcare, urban living, and sustainability. A*STAR plays a key role in nurturing scientific talent and leaders for the wider research community and industry. A*STAR’s R&D activities span biomedical sciences to physical sciences and engineering, with research entities primarily located in Biopolis and Fusionopolis. For ongoing news, visit www.a-star.edu.sg.
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