Personal Details

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Dr. TANG Xiaosong, Eric

Senior Specialist II


Nanofabrication (NFB) Department


2 Fusionopolis Way Innovis, #08-03, Singapore 138634

Research Details

  • Nano-fabrication and technology
  • Design, fabrication and characterization of MEMS/NEMS devices
  • Dry etching of semiconductor materials

Nanofabrication, especially on patterning and Dry etching of semiconductor materials

Cleanroom technology on process, equipment and facility support

MEMS/NEMS based device design, fabrication and characterization

Friction and tribology issue related to microstructures

Superlubricity related AFM technology

Industry Project:  IMRE-AMS flat lens project (IMRE/18-3R1405)


Service project:  Large area stencil mask development and manufacturing 

Service Project:  AMAT wet bench chemical clean processes


Previous Completed Projects

·         Large area stencil mask development and manufacturing IMRE/16-3D0503

·         Aerospace program cycle10 project (IMRE/16-8D0214) , Involvement  is to explore RIE techniques on special polymer

·         Complete Projects on Superlubricity machining

·         Complete SONY-IMRE PZT MEMS industry project as the microfabrication leader, fabricate and deliver the prototype devices.

2001 - Present Senior Research Officer, IMRE
2005 - present PhD candidates, Mechanical Engineering, NUS
1998 - 1999 Visiting Scientist, Cornell University
1994 - 1997 Engineer, Charterred Semiconductor and Manufacturing

Ph.D. (Mechanical Engineering), National University of Singapore, Singapore

Master of Electrical Engineering, Cornell University, USA

BSc. Electrical Engineering, Xian Jiaotong University 1994

1998/1999 Visiting Scientist, Cornell University

2005-2013 A-star SSDA scheme


X.S. Tang, Y.C. Loke, P. Lu, S.K. Sinha, and S.J. O’Shea “Friction measurement on free standing plates using atomic force microscopy", Review of Scientific Instruments ,84(1),



X.S. Tang, S.J. O’Shea and Ivan U. Vakarelski “Photoresist Templates for Wafer-Scale Defect-Free Evaporative Lithography” Advanced Materials, 22, (2010) 5150–5153


I.U. Vakarelski, R. Manica, X.S. Tang, S.J. O‘Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan “Dynamic interactions between microbubbles in water” PNAS 107 (25) (2010), 11177–11182.


IU Vakarelski, JW Kwek, X Tang, SJ O'Shea,“Particulate Templates and Ordered Liquid Bridge Networks in Evaporative Lithography”, Langmuir, 2009 25 (23), 13311-13314. ( This paper has been selected for highlighting by A*STAR Research.)



O. Manor, I.U. Vakarelski, X.S. Tang, S.J. O’Shea, G.W. Stevens, F. Grieser, R.R. Dagastine and D.Y.C. Chan, “Hydrodynamic boundary conditions and dynamic forces between bubbles and surfaces”, Phys. Rev. Lett. 101 (2008), 024501.



Hybrid Supercell Metasurface for Multi-spectral Geometric Phase Modulation , Wang Qian, Deng Jie, Tang Xiaosong, Norman Ang, Teng Jing Hua,

Intended for publication/presentation to: ICMAT 2019


Microfabricated devices for friction measurements, Tang Xiaosong, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009, International Conference on Materials for Advanced Technologies, June 28 – July 3 2009, Singapore.



Fabrication of mass loaded MRFM cantilever with integrated tip and ultra-low spring constant, Tang Xiaosong, Simon Rast, Ernst Meyer, Sujeet K. Sinha and S.J. O‘Shea, ICMAT 2009


Biao Li, Xiaosong Tang, "Focused Ion Beam (FIB) Nano-Machining and FIB Moiré Technique for Strain Analysis in MEMS/NEMS Structures and Devices", MEMS2003.


Franck Chollet, Tang Xiaosong, "Displacement/Acceleration Optical Sensing With Surface Micromachined Shutter and Low -voltage Electronics" Transducers 99 2D 1.4.


US7208806B2 Yao Kui, Eric Tang Xiaosong, Gao Peng, He Xu Jiang, Zhang Jian, Shannigrahi SantiranjanMicro-Electromechanical Device”


US 6183189. EZ Liu, XS Tang, Charles Lin and YS Lien, "Self-aligning wafer chuck design for wafer process tools".

Last updated on : 05 Apr 2019 04:35 PM