Personal Details

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Mr. CHEN Yi Fan

Senior Specialist I


Nanofabrication (NFB) Department


2 Fusionopolis Way Innovis, #08-03, Singapore 138634

Research Details

MEMS, BioMEMS, Microfabrication
  • Silicon bulk micromachining (wet bench) equipment
  • Surface micromachining ( furnace, PECVD, RIE, sputtering, evaporation)
  • Measurement equipment (SEM, surface-profiler, ellipsometer)
  • Photolithography and development
  • Mask design and drawing
  • Heat transfer, microflow and mechanics FEM simulation
  • Applications of Ferroelectric Thin Films for UV Detection
  • 2000-2001
Research Associate in Nanyang Technological University
  • 2002-Current
Research Officer in Institute of Material Research & Engineering
M.Eng. Nangyang Technological University, SG, 2000
  • PCT WO 2005/044364 A1 Mircroneedles and Microneedle fabrication

Last updated on : 04 Sep 2017 06:35 PM