Personal Details

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Mr. CHEN Yi Fan

Senior Specialist II


Nanofabrication (NFB) Department


2 Fusionopolis Way Innovis, #08-03, Singapore 138634

Research Details

MEMS, BioMEMS, Microfabrication
  • Silicon bulk micromachining (wet bench) equipment
  • Surface micromachining ( furnace, PECVD, RIE, sputtering, evaporation)
  • Measurement equipment (SEM, surface-profiler, ellipsometer)
  • Photolithography and development
  • Mask design and drawing
  • Heat transfer, microflow and mechanics FEM simulation
  • Applications of Ferroelectric Thin Films for UV Detection
  • A Handheld SAW Biosensor System for Rapid and Accurate Diagnosis of Influenza

  • Advanced Shearography Techniques for Defect Characterisation in Composite Materials

  • 2000-2001
Research Associate in Nanyang Technological University
  • 2002-Current
Research Officer in Institute of Material Research & Engineering
M.Eng. Nangyang Technological University, SG, 2000
Won IES Prestigious Engineering Achievement Awards 2018 by “Bulk photovoltaics and unique UV sensors from bulk photovoltaics”


  •  Miniaturized Acceleration Sensors With In-Plane Polarized Piezoelectric Thin Films Produced by Micromachining, Saravanan Shanmugavel, , Kui Yao, Trung Dung Luong, Sharon Roslyn Oh, Yi Fan Chen, Chin Yaw Tan, Ajit Gaunekar, Peter Hon Yu Ng, and Marchy Hing Leung Li IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 58, no. 11, November 2011
  • Directed acoustic shearography for crack detection around fastener holes in aluminum plates Huajun Liu, Menglong Liu, Lei Zhang, Yi Fan Chen, Chin Yaw Tan, Shifeng Guo, Fangsen Cui NDT and E International 100 (2018) 124–131
  • Surface acoustic wave sensor for influenza detection US2016/0313316, Kui Yao, Chin Yaw Tan, Ying Jiang, Yi Fan Chen, Sze Yu Tan, Lei Zhang

  • Wireless Piezoeletric Accelerometer and System US2017/0030944, Kui Yao, Zhiyuan Shen, Chin Yaw Tan, Yi Fan Chen, Lei Zhang

Last updated on : 05 Apr 2019 04:31 PM