Personal Details

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Mr. CHEONG Khee Leong

Senior Specialist I

Staff

Nanofabrication (NFB) Department

63194827

kl-cheong@imre.a-star.edu.sg

2 Fusionopolis Way Innovis, #08-03, Singapore 138634


Research Details


  • Dicing, Back-Grinding
  • Good equipment knowledge in semiconductor tools;
    • CVD Tools - PE, LP, HD, AP
    • PVD Tools - DC sputtering, Sputter Etch
    • Etch Tools - RIE, DRIE
  • Fabrication of Free-Standing Low-Stress Stencil Mask
  • 2003 - Current Senior Specialist I, IMRE
  • 2002 Self-Employed
  • 2000 - 2001 Field Service Engineer (Applied Materials)
  • 1993 - 2000 Equipment Engineer (Chartered Semiconductor)
  • Diploma in Electronics Engineering (Ngee Ann), 1990

Last updated on : 05 Apr 2019 04:38 PM