Personal Details

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Mr. LIM Chee Beng

Senior Specialist III


Nanofabrication (NFB) Department


2 Fusionopolis Way, Innovis, #08-03, Singapore 138634

Research Details

  1.  Nano-fabrication

  2.  Equipment Maintenance and troubleshooting

  1.  Quantum nanostructure fabrication

  2.  Thin film deposition –PVD CVD

  3.  Electron beam lithography

  4.  DRIE Etching

  1.  Engineering of a Scalable Photonics Platform for Quantum Enabled Technologies

  2.  SpOT-LITE: Spin-Orbit Technologies for Intelligence at the Edge

1999-2004-Service and Process Engineer (Applied Material South East Asia)


2004-2010 –Lead Field Service Engineer (Intevac Asia Pte Ltd)


2010-2018 – Senior Research Engineer, Data Storage Institute (DSI), A*STAR


2018-Present – Senior Specialist III, Institute of Materials Research and Engineering (IMRE), A*RES

Bachelor of Engineering (Mechanical)

Nanyang Technological University


1.     H.L. Seet, K.K. Ng, X.Y. Chen, P. Yang, L. Shen, R. Ji, H.X. Ng, C.B. Lim. Study of facing target sputtered diamond-like carbon overcoats for hard disk drive media. Thin solid films (2015) 586:58-63.

2.     J.F. Hu, K.M. Cher,V. Binni, B.X. Xu, C.B. Lim, J.Z. Shi, Y.J. Chen, K.D. Ye, J. Zhang, C.W. An, W.H. Tsai. FePt based HAMR media with a function layer for better thermal control. IEEE transactions on magnetic(2016)

Last updated on : 03 Apr 2019 05:00 PM