12 Apr 2012   |   9:00 am to 1:00 pm,   Theatrette, Level 1, TÜV SÜD PSB Building, 1 Science Park Drive, Singapore 118221

Seminar on Measurement Issues at Micro-scale


As devices become increasingly smaller, feature sizes in terms of micrometres present new challenges in engineering design and manufacturing. Precision manufacturing of micro-devices involve techniques such as photolithography, chemical etching, mechanical machining, EDM, laser cutting & drilling, and injection moulding. In addition, products formerly manufactured by thin film technology using semiconductor processes are being replaced by more efficient full 3D micro manufacturing techniques, which have been extended to polymers, metals and ceramics.

Micro-scale measurement methods, such as geometrical, dimensional and surface roughness, provide highly accurate measurements to the micrometre levels, which are critical to the precision manufacturing of high quality products.

The National Metrology Centre (NMC) is organising the seminar jointly with Xmicro Solution (XMS), Singapore to discuss techniques for micro-scale level measurements. The topics will cover current state of dimensional micro-metrology, micro-scale contact and non-contact instrumentation, metrology standards, industry applications and R&D activities.


8:30 am


9:00 am

Welcome Address
Dr Thomas Liew, Acting Executive Director, National Metrology Centre

9:10 am

Non-contact Optical Micro-scale Surface Metrology
Dr Wang Shihua, Senior Metrologist, Optical Metrology, National Metrology Centre


Micro Systems Technologies (MST), MicroElectroMechanical Systems (MEMS) and  micromanufacturing have become synonymous with the design, development, and manufacture of very small devices and systems. Besides continuing effort in developing MEMS-based manufacturing techniques, latest effort in micro-manufacturing is also applicable to non-MEMS-based manufacturing. Research and technological development in related field is encouraged by the increased demand on surface metrology of micro-components to be promised development in the scaling down of the traditional macro-manufacturing processes for micro-length-scale manufacturing.

This talk will introduce micro-scale surface metrology using non-contact optical methods and  specifically on the development of a large scanning range laser confocal microscope for calibration and measurement of micro-structures, such as cutting tool edge, laser marking, micro-channel in microfluidic device, lens array mould, flatness of super-low reflection (less than 2%) coating surface, low reflection rock surface etc. In addition, some typical application of laser & white-light interferometry for measuring micro-surface deformation of micro-beam in MEMS accelerometer, membrane in microphone and surface of micro-mirror will be shared.

9:40 am

A 3D Measuring Laser Microscope development and its application
Mr Tatsuya Hongo, Senior Sales & Marketing Executive, Olympus Corporation, Japan


Light microscopy plays an important role in today’s research and routine inspection works. However, light microscopy only able to give you magnification max at 1,000x – 1,500x and specimen observation limited to 2D image. Confocal laser scanning microscopy (CLSM) is a technique for obtaining high-resolution optical images with depth selectivity. The key feature of confocal microscopy is its ability to acquire in-focus images from selected depths, a process known as optical sectioning. Images are acquired point-by-point and reconstructed with a computer, allowing three-dimensional (3D) reconstructions of topologically-complex objects.
The laser microscope has evolved to the next level that advancing rapidly from only displaying 3D images to measure and display micro geometry. The Olympus OLS 4000 not only meant for specimen surface observation, it also generate 3D images of your specimen topography in normal color, laser scanning contrast and differential interference contrast (DIC), integrated with non-contact surface. The speaker will introduce the principle and its application of OLS4000.

10:10 am

Tea Break & Exhibition

11:00 am

Automated 3D CT: Industrial Development and Trends
Mr Lim Seng Hoo, Director, Cairnhill Metrology Group, Singapore


Technological breakthroughs in X-ray volume graphics reconstruction and visualisation coupled with powerful advances in 64-bit PC computer processing, have spawned a new generation of 3D Computer Tomography capable of performing 3D metrology and reverse engineering in addition to materials and defects analysis. With increased awareness on security, reliability and safety, led by the aerospace, nuclear energy, automotive and food industries, take up usage of X-ray computed tomography (XCT) in industry is experiencing interesting growth.

This presentation will discuss the enabling technologies and techniques borrowed from existing 1) medical imaging CT; 2) CAD-CAM manipulation of complex 3D engineering drawing; and 3) 3D Coordinate Measuring Machine know-how in reducing mechanical errors based on the Abbe principle, as well as advances in CMM software; 4) knowledge of the control and compensation of X-ray beam artefacts such as beam drift and beam hardening, and 5) new research and development of traceable calibration objects.  The speaker will share from his experience in the marketing of: - 1) automated in-line X-Rays for the food industry; 2) Metrology-Tomography XCTs; and 3) high-density point cloud processing software for laser scanners and CT reconstructions.

11:30 am

Stylus-based Surface Form Metrology
Dr Chao Zhixia, Metrologist, Optical Metrology, National Metrology Centre (NMC)


The measurement of surface form, such as roundness, roughness and flatness, is essential in mechanical & optical production control.  There are many different measurement technologies for form measurement depending on the type of form to be measured.  Stylus based method is generally used for roundness and roughness measurement.  Laser interferometry based method is mainly for non-contact measurement on optical surfaces. 

This presentation will mainly focus on the development and applications of stylus-based surface form metrology.  Precision roundness metrology with the application of error separation technique will be highlighted in the talk.  Work on aspherical surface and free form surface metrology based on a 3D profiler will also be introduced.

12:00 pm

Lunch & Exhibition

1:00 pm

End of Event

About the Speakers

Dr Wang Shihua, Senior Metrologist, Optical Metrology, National Metrology Centre

Dr Wang Shihua is a Senior Metrologist in Optical Metrology, and is currently involved in the length and dimensional calibration & measurement in both micro-scale and nano-scale order. Dr Wang received his BEng, MEng and PhD degrees from Sichuan University, Chengdu, China, in 1987, 1990 and 1996 respectively. Prior to joining NMC in 2005, Dr. Wang worked as a Research Fellow in the Department of Mechanical and Production Engineering, National University of Singapore and a Lecturer and Associate Professor in Sichuan University, China. He is the author or co-author of over 70 published scientific papers. His R&D interests include surface metrology using laser, white-light interferometry and laser confocal microscopy, length and dimensional measurements, light scattering surface roughness measurement, MicroElectroMechanical Systems (MEMS) testing and optics-mechanical design.

Mr Tatsuya Hongo, Senior Sales & Marketing Executive, Olympus Japan

Mr. Hongo Tatsuya graduated from the KEIO University, Japan in 2003 and joined Olympus Corporation to take care of domestic marketing and sales of Industrial Microscope. In 2005, he was assigned to be in charge of the product planning of the Industrial Microscope. After one year in the product planning, in 2006, he was assigned to take care of the Asia Market for the sales of Industrial Microscope. With four years of experience on Asia Market, he was tasked to stay in Singapore to support South East Asia Market on the technical, sales & Marketing of Industrial Microscope.

Mr Lim Seng Hoo, Director, Cairnhill Metrology Group, Singapore

Mr Lim Seng Hoo graduated with a BAcc (Hons) from the University of Singapore in 1980 and joined Ernst & Young until 1984.  He later in 1998 also completed an MBA (International Business) at Nanyang Technological University.  In 1986, he invested in a fledging machinery distributor and transformed this into Cairnhill Metrology, a leading regional metrology solutions provider (for length dimension and weights), with offices today in Singapore, Kuala Lumpur, Penang and Johore, Jakarta, Surabaya and Medan, Manila and Bangkok. Cairnhill’s solutions include: - 1) Automated Checkweighers, Metal Detectors and X-Ray Inspection for Product Safety; 2) Nano 3D Profilers and Precision Machining; 3) 3D X-Ray Computer Tomography, 3D CMMs (tactile, optical, confocal, laser), Surface Roughness, Profile and Roundness Metrology, Gear Testers, Profile Projectors, Microscopes and Length Metroscopes for Reference Metrology; 4) Portable Measurement:  White-Light Photogrammetry, Laser and Optical Trackers, Portable Arm CMMs; and 5) Software for X-ray Voxel Data Visualisation, High Density Point Cloud Inspection and Modelling, 2 & 3D Metrology and Retrofits, SPC, etc. 

Dr Chao Zhixia, Metrologist, Optical Metrology, National Metrology Centre

Dr Chao Zhixia is currently working at the National Metrology Centre, Singapore, as a Metrologist.  She received her BSc and PhD in Optical Engineering from Tsinghua University, China.  After spending one year (2001-2002) at Blue Sky Systems as a R&D Engineer, she worked at the Nanyang Technological University, Singapore as a Research Fellow.  She has been with the National Metrology Centre since 2005. She holds two patents and has published more than 20 journal papers in areas of tunable laser, absolute laser interferometry and fluorescence detection.  Her current research interest covers areas in coordinate metrology, free form metrology and laser interferometry.