Equipment Integration in Factory Systems for Semiconductor Manufacturing

Date: 04 Jul 2006 - 08 Aug 2006

Venue: Training Room, Level 3, SIMTech Tower Block Tower Block

Course Introduction

This course provides participants with a comprehensive introduction and overview of the intertwining semiconductor manufacturing integration and equipment controller architecture, system interface issues, and standards. For example, SEMATECH standard, IEC (Industrial Electrotechnical Commission), SEMI (Semiconductor Equipment & Materials International) standards. The focus will be on practical design and implementation for both equipment manufacturers and device/chip manufacturers. Lab sessions will provide hands-on experience in SEMI’s, SECS (Semiconductor Equipment Communication Standard), HSMS (High Speed Messaging Standards), GEM (Generic Equipment Model) communication, testing, and scripting.


Mr Goh Kiah Mok (Team Leader), Mr Bryan Ng, Ms Phua Geok Hong & Mr William Tan

Course Outline

- Factory Integration for Semiconductor Manufacturing
- Cell Control Systems
- Equipment Control System
- SEMI Interface and Communication Standard
- Theory and Implementation
- Equipment Interface Testing and Characterisation

For Whom

Industry professionals, managers, engineers, executives and technologists, software developers, system integrators, CIM (Computer Integrated Manufacturing) engineers, equipment makers from the semiconductor, electronics, automation industries. This course will benefit those who are interested to understand more about factory integration or equipment controller development for the semiconductor manufacturing industry.


Pre-registration for the course is necessary. Seats are available on a first-come first-served basis. For the

Registration fees: S$525.000 (inclusive of 5% GST).

Closing date: 30 June 2006

For registration and general enquiry, please contact Alice Koh at Tel: 6793 2927

SIMTech member enjoy 20% discount, terms and conditions apply. (Limited to 2 participants for Category I members and 4 participants for Category II members) Companies which join SMS now enjoy a complimentary TIP seat.

For enquiry on SMS Membership: Please contact Devi at 6793 8388 or email for more details.