Research Projects


This research aims to develop capabilities in patterning micro-, nano- structures and devices using thermoplastics. Fundamental investigations are conducted using NEB-22 resist as the substrate material in the imprinting of micro- and nano- structures. Imprinting on 200 mm diameter wafers has been achieved with well acceptable uniformity. Features with linewidths down to 50 nm and uniformity with less than±1% over an 8-inch wafer has been obtained. Micro-gratings for optical sensing, nano-scaled channels and pillars for bio-related filtering have been manufactured. The coating of self-assembled monolayers (SAMs) on silicon moulds to assist demoulding had been studied.

Contact PersonNg Sum Huan Gary(
SolutionNanoimprinting technology, as one of the most promising fabrication technologies, has been demonstrated to be a powerful tool for large area replication up to wafer-level, with features down to nanometre scale.
ApplicationsThis fast and low cost method becomes an increasingly important solution for the fabrication of biochemical, microfluidic, micro-optical and telecommunication devices. Due to its advantages over conventional fabrication methods in terms of process flexibility, process simplicity, low cost and bio-compatibility, nanoimprinting will find wide applications in fluidic systems, biomedical systems as well as optical and sensing systems.

Problems Addressed

This project aims at developing in-house capabilities in the large area patterning of micro- and nano- features on polymer substrates.