Non-contact optical measurements of surface flatness, form error and radius of curvature of spherical surface.
High Precision White Light Interferometer
It is a non-contact areal surface profiler where an interference objective (Michelson/Mirau) is used to magnify the sample surface to be captured by a CCD camera. The resulting interference pattern based phase shifting and vertical scanning interferometry is used to measure surface topography.
- Model: Bruker ContourGT-X
- Vertocal Measuring range: up to 10 mm
- Measuring resolution: 0.1 nm
- Manification: up to 100X
- Sample Height: up to 100 mm
Flatness & Spherical Surface Laser Interferometer
A vertical laser interferometer for high-precision flatness and radius of curvature measurement of plane and spherical surface at nanometer accuracy level.
- Model: Zygo Verifire XP/D
- Measurement area: 102 mm (4 inch)
- Measurable surface reflectivity: 0.1% ~ 100%
- Measurement uncertainty: 32 nm
- Radius of curvature measurement:
- Measuring resolution of 1 µm
- Measuring range of 150 mm
- Measuring accuracy of 10 µm
Capabilities Applications
Precision measurement to evaluate the geometrical profile of mirro-finished surface (e.g. lens, wafers, etc.)
Location
V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662
National Metrology Centre
1 Science Park Dr, Singapore 118221