Stylus Profilometer

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Probe-based profiler capable of 3D surface profilometry and surface roughness characterization at nanometer level.

EQUIPMENT SPECIFICATIONS

Model: Form Talysurf 200

Vertical resolution: 0.2 nm
Data sampling in X-axis: 0.125 µm
Max. scan size: 200 mm (x) x 100 mm (y) x 25 mm (z)

Model: KLA Tencor P16

Wafer Size: From small samples up to 200mm wafers
Scan range: up to 200 mm
Vertical range: up to 110 um
Step height repeatability of 6Å or 0.1% (1σ)

Model: Talylor Hobson PGI2540

Measuring range:

Z axis – 12.5 mm ( 60 mm stylus arm), 25.0 mm (120 mm stylus arm)
X axis – 200 mm

Measuring resolution:

Z axis – 0.2 nm at 12.5 mm range, 0.4 nm at 25.0 mm range
X axis – 125 nm over 200 mm

System noise: 1 nm RMS
Form measuring uncertainty: 200 nm
Stylus radius: 2 µm, 5 µm, 0.25 mm and 0.5 mm

Model: Panasonic UA3P

Direct traceability to SI metre
Measuring range: 30 mm x 30 mm x 20 mm
Measuring resolution: 3 nm
Maximum measuring angle: 75 °
Measuring uncertainty:

Less than 30°: 50 nm
30°to 45° : 80 nm
Above 45° : 150 nm

Stylus Radius: 2 μm (Diamond), 0.5 mm (Ruby)
Probing force : 150 to 300 μN

Model: NanoMap-500LS 3D Contact Surface Profilometer

Piezo Tip scan
Z range: nm to 1m
XY scanning range: up to 150X150mm
Generates both 3D image and 2D images
Integrated color optical camera for direct sample viewing during scanning

CAPABILITIES / APPLICATIONS

High-precision measurement on machined parts or coatings with high surface quality for manufacturing industry in precision engineering, optics, electronics, etc.

LOCATION

V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662

National Metrology Centre
1 Science Park Dr, Singapore 118221

Institute of Materials Research and Engineering
Synthesis, 6 Fusionopolis Link

Institute of Microelectronics
11, Science Park Road, Singapore Science Park II, Singapore 117685

EQUIPMENT ENQUIRY

Enquiry Form

Stylus Profilometer

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