3D Non-contact Metrology System

High-resolution optical 3D surface system for the dimensional measurement of 3D surface profile , dimensions and surface roughness of precision components.

Equipment Specification

Model: Stresstech Xstress Robotic XRD

Vertical resolution: 10 nm – 10 µm depending on speed and objective
Lateral resolution: 400 nm – 23 µm depending on speed and objective
Maximum slope angle: up to 80°
Lateral travel range (XY): 100 mm x 100 mm

Model: Nanofocus µ-Surf

Vertical Resolution: 20 nm
Focused laser spot: 1 µm
Working Distance: 13 mm
Large lateral scanning range: 200 mm x 200 mm

Capabilities / Applications

Precision measurement and evaluation of precision parts manufactured for tooling, molding, automotive, electronics, and aerospace industries, as well as micro and precision manufacturing and medical engineering.

Location

V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662

National Metrology Centre
1 Science Park Dr, Singapore 118221

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