Coordinate Measuring Machine (CMM)
Equipment Specification
- Resolution: 20nm (x, y, z axis)
- Accuracy:
- MPE_E =(0.6 + L/500) μm, L: measuring length (mm)
- MPE_P = 0.6 μm
- MPE_THP = 1.5 μm in 45 s
- Measuring range: 900 mm(x) X 1300 mm(y) X 650 mm(z)
- Probes: ruby and other hard material touch probes
Capabilities / Applications
Location
V1-E06b, SIMTech Valley Block (Level 1)
73 Nanyang Dr, Singapore 637662
National Metrology Centre
1 Science Park Dr, Singapore 118221
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