


• The advent of electromagnetic metasurface has opened a novel pathway to achieve unprecedented manipulation of electromagnetic waves. The spectral scalability of electromagnetic metasurface concept makes it extremely attractive for exploring terahertz wave control. The team focuses on developing microelectromechanical systems (MEMS) integrated terahertz metasurfaces. Bimaterial cantilevers are used as active element for the experimental demonstration of various terahertz devices including spectral filters, polarizers, perfect absorbers and dynamic beam steerers. The devices are fabricated on 12” CMOS compatibility in-house foundry with the potential to scale to nanometric dimensions.
• The adoption of MEMS as an active element for reconfigurable metasurface provides four critical advantages – (i) unmatched reconfigurability, (ii) extremely low energy consumption, (ii) functional versatility and (iv) potential for large-scale manufacturability. Hence, making them highly attractive for the next generation of 6G communications devices.