Sensors, Actuators & Microsystems

The Sensors, Actuators, & Microsystems team focuses on developing novel transducers at the heart of many electronic systems today, bridging the electronic and the real world. Semiconductor microfabrication techniques are leveraged for engineering high performance, microscale devices that can be batch fabricated at low-cost. Some of the key themes in the group are: acoustic sensors, piezoelectrics, as well as gas and chemical sensors.

Chemical Sensor

Acoustic MEMS

MEMS for RF & Computation

Optical Sensors

Emerging Memories

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