IME News & Highlights
PiezoMEMS Workshop
01 Apr 2024
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Our scientist Chen Liu, represented the Institute of Microelectronics at the 10th PiezoMEMS Workshop in Aachen, Germany hosted by aixACCT Systems GmbH. It was an insightful event which gathered over 100 industry experts worldwide to present their latest advancements in the field of piezoelectric MEMS technology.
Chen Liu's invited talk, titled "Thin film ScAIN for RF acoustic resonators and filters", highlighted our latest progress on the development of 100nm thin ScAlN films and demonstrations of over 15GHz BAW resonators and filters.
Posted in: IME Happenings
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